RENISHAW RLD10-X3-DI 光纤激光编码器

产品标题：RENISHAW RLD10-X3-DI 光纤激光编码器

产品型号：RLD10-X3-DI

质保：七天验收期，质保期一年

交货期： 1-3个工作

产品图片展示

产品详情资料

RENISHAW RLD10-X3-DI 光纤激光编码器 特点（10 条） 差分干涉测量架构，可消除环境扰动带来的共模误差 超高测量分辨率，较好可达 38.6pm，定位精度优异 光纤传输激光，激光源与测量头分离，降低腔体发热 内置光束调整组件，可在真空腔外部直接校准光路 超低周期测量误差，适合纳米级精密位移反馈 三针式固定安装结构，拆装后光路偏移量极小 支持较好 1m/s 高速运动平台实时位置采集 真空兼容设计，可直接用于半导体真空工艺腔体 多通道条纹检测系统，抗光强波动能力强 紧凑光学探头，占用腔体外安装空间小 应用领域（5 条） 半导体光刻机精密运动平台位置反馈 真空腔体 XY 纳米定位台位移测量 晶圆检测设备高精度计量系统 精密光学仪器多自由度几何测量 雷尼绍激光干涉计量设备备件替换项目

Product Details

#RENISHAW RLD10-X3-DI Fiber Laser Encoder

##Characteristics (10 points)

1. Differential interferometric measurement architecture, which can eliminate common mode errors caused by environmental disturbances
2. Ultra high measurement resolution, up to 38.6pm, excellent positioning accuracy
3. Fiber optic transmission of laser, separation of laser source and measuring head to reduce cavity heating
4. Built in beam adjustment component, which can directly calibrate the optical path outside the vacuum chamber
5. Ultra low cycle measurement error, suitable for nanometer level precision displacement feedback
6. Three pin fixed installation structure, with minimal optical path deviation after disassembly and assembly
7. Support real-time position acquisition on high-speed motion platforms up to 1m/s
8. Vacuum compatible design, can be directly used in semiconductor vacuum process chambers
9. Multi channel stripe detection system with strong resistance to light intensity fluctuations
10. Compact optical probe, occupying small installation space outside the cavity

##Application areas (5 items)

1. Position feedback of precision motion platform for semiconductor lithography machine
2. Displacement measurement of XY nanometer positioning table in vacuum chamber
3. High precision measurement system for wafer inspection equipment
4. Precise optical instruments for multi degree of freedom geometric measurement
5. Renishaw Laser Interferometer Equipment Spare Parts Replacement Project

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