MKS 683B-25580 数字排气节流阀

产品标题：MKS 683B-25580 数字排气节流阀

产品型号：683B-25580

质保：七天验收期，质保期一年

交货期： 1-3个工作

产品图片展示

产品详情资料

MKS 683B-25580 数字排气节流阀 特点（10 条） 阀体与驱动控制一体化设计，无需外接独立控制器 内置第二代 PID 算法，压力调节响应快，超调量小 支持 DeviceNet 数字总线，可直接接入设备控制系统 具备压力控制、阀片位置控制两种工作模式 阀片定位分辨率高，微小流量调节精度优异 阀体采用 316L 不锈钢材质，适配各类工艺气体 内置两路可编程报警继电器，用于工艺安全联锁 可搭配 MKS 电容压力计，组成闭环真空压力系统 密封件耐腐蚀性强，适配半导体腐蚀性工艺气体 阀片位置反馈输出，便于故障诊断与状态监控 应用领域（5 条） 半导体刻蚀腔体下游真空压力控制 薄膜沉积设备工艺压力调节单元 光伏真空镀膜设备排气流量管控 精密高真空系统动态压力闭环控制 半导体真空工艺设备备件替换项目

Product Details

#MKS 683B-25580 Digital Exhaust Throttle Valve

##Characteristics (10 points)

1. Integrated design of valve body and drive control, no need for external independent controller
2. Built in second-generation PID algorithm, fast pressure regulation response, and small overshoot
3. Supports DeviceNet digital bus and can be directly connected to device control systems
4. It has two working modes: pressure control and valve position control
5. The valve plate has high positioning resolution and excellent precision in regulating small flow rates
6. The valve body is made of 316L stainless steel material, suitable for various process gases
7. Built in two programmable alarm relays for process safety interlocking
8. Can be paired with MKS capacitive pressure gauge to form a closed-loop vacuum pressure system
9. The sealing component has strong corrosion resistance and is suitable for semiconductor corrosive process gases
10. Valve position feedback output, convenient for fault diagnosis and status monitoring

##Application areas (5 items)

1. Vacuum pressure control downstream of semiconductor etching chamber
2. Pressure regulating unit for thin film deposition equipment process
3. Exhaust flow control of photovoltaic vacuum coating equipment
4. Dynamic pressure closed-loop control of precision high vacuum system
5. Replacement project for spare parts of semiconductor vacuum process equipment

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