MKS 901P-11130-0167 真空压力传感器

产品标题：MKS 901P-11130-0167 真空压力传感器

产品型号：901P-11130-0167

质保：七天验收期，质保期一年

交货期： 1-3个工作

产品图片展示

产品详情资料

MKS 901P-11130-0167 真空压力传感器 特点（10 条） 复合 MicroPirani 与压电传感技术，量程覆盖宽 压力响应速度快，实时采集真空压力变化 不锈钢真空接触面，洁净耐腐蚀 多档位预设压力控制点，支持设备联锁 支持多角度安装，安装姿态不影响测量精度 内置故障自检，异常状态可快速上报 低漂移特性，长期运行测量稳定性好 具备模拟与数字信号输出，适配工控系统 可承受腔体高温烘烤除气，满足真空工艺要求 一体式紧凑型结构，占用安装空间小 应用领域（5 条） 半导体设备负载锁腔体压力监测 真空镀膜工艺压力检测单元 精密科研真空腔体压力测控 真空处理设备压力闭环控制系统 高端真空设备备件替换项目

Product Details

#MKS 901P-11130-0167 Vacuum Pressure Sensor

##Characteristics (10 points)

1. Composite MicroPirani and piezoelectric sensing technology, with wide range coverage
2. Fast pressure response speed, real-time collection of vacuum pressure changes
3. Stainless steel vacuum contact surface, clean and corrosion-resistant
4. Multi gear preset pressure control points, supporting equipment interlocking
5. Support multi angle installation, installation posture does not affect measurement accuracy
6. Built in fault self check, abnormal status can be quickly reported
7. Low drift characteristics, good long-term measurement stability during operation
8. Equipped with analog and digital signal output, suitable for industrial control systems
9. Can withstand high temperature baking and degassing of the chamber, meeting the requirements of vacuum technology
10. Integrated compact structure, occupying little installation space

##Application areas (5 items)

1. Pressure monitoring of semiconductor equipment load lock chamber
2. Vacuum coating process pressure detection unit
3. Precision research vacuum chamber pressure measurement and control
4. Pressure closed-loop control system for vacuum processing equipment
5. High end vacuum equipment spare parts replacement project

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